Inventor

SCHOENLEBER MARTIN

DE4 patents

⚠️ This page may combine multiple inventors who share the name “SCHOENLEBER MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PRECITEC OPTRONIK GMBH

2 patents

US9230817B2Jan 5, 2016

Apparatus and method for monitoring a thickness of a silicon wafer with a highly doped layer

PRECITEC OPTRONIK GMBH2 citations59

US9770783B2Sep 26, 2017

Method for measuring the distance between a workpiece and a machining head of a laser machining apparatus

PRECITEC OPTRONIK GMBH0 citations36

DUSEMUND CLAUS

1 patent

US8716039B2May 6, 2014

Monitoring apparatus and method for in-situ measurement of wafer thicknesses for monitoring the thinning of semiconductor wafers and thinning apparatus comprising a wet etching apparatus and a monitoring apparatus

DUSEMUND CLAUS9 citations76

SCHOENLEBER MARTIN

1 patent

US8699038B2Apr 15, 2014

Apparatus and method for monitoring a thickness of a silicon wafer with a highly doped layer

SCHOENLEBER MARTIN5 citations64