Inventor

MURAKAMI KATSUHIKO

JP37 patents

⚠️ This page may combine multiple inventors who share the name “MURAKAMI KATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MURAKAMI KATSUHIKO

NIKON CORP

Multi-layered mirror

Optical element, production method of optical element, optical system, and optical apparatus

Reflective-type soft x-ray microscope

X-ray-generation devices, X-ray microlithography apparatus comprising same, and microelectronic-device fabrication methods utilizing same

Reflection masks, microlithography apparatus using same, and integrated circuit manufacturing methods employing same

Multi-layered mirror

Multi-layer X-ray-reflecting mirrors with reduced internal stress

Multilayer-film reflective mirrors, extreme UV microlithography apparatus comprising same, and microelectronic-device manufacturing methods utilizing same

Reflection mask for X ray

High-luminosity EUV-source devices for use in extreme ultraviolet (soft X-ray) lithography systems and other EUV optical systems

EUV multilayer mirror with phase shifting layer

Reflective mirror for soft x-ray exposure apparatus

Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems

Multi-layered mirror

Laser plasma EUV light source, target material, tape material, a method of producing target material, a method of providing targets, and an EUV exposure device

Extreme ultraviolet exposure apparatus and vacuum chamber

Reflecting photo mask for x-ray exposure and method for manufacturing the same

EUV light source, EUV exposure equipment, and semiconductor device manufacturing method

Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus

Multilayer mirror, method for manufacturing the same, and exposure equipment

Multilayer mirror, method for manufacturing the same, and exposure equipment

Multilayer film reflector, method of manufacturing multilayer film reflector, projection optical system, exposure apparatus, and method of manufacturing device

NIPPON KOKAN KK

Apparatus for monitoring and controlling the level of the molten metal in the mold of a continuous casting machine

Method for manufacturing alloy rod having giant magnetostriction

Method for manufacturing alloy rod having giant magnetostriction

Immersion nozzle for continuous casting

ISHIDA KOKI SEISAKUSYO KK

Weighing method and apparatus

Method of weighing and apparatus therefor

ISHIDA SCALE MFG CO LTD

Combinatorial weighing system

Article feeding apparatus

BUNKA SHUTTER

Connection member for construction materials, connecting fitting therefor, connecting structure therefor, and connecting method therefor

Connecting fitting construction materials and connecting method therefor

MURAKAMI KATSUHIKO

Optical element, exposure apparatus using this, and device manufacturing method

EUV light source, EUV exposure apparatus, and electronic device manufacturing method

FUJITSU LTD

Non-transitory computer-readable storage medium for storing machine learning program, machine learning method, and machine learning apparatus of improving prediction accuracy in knowledge graph embedding

Method and apparatus for machine learning

HITACHI LTD

Electrophoresis analyzer with wavelength selective detection