Inventor

GYTRI LISA

US5 patents

⚠️ This page may combine multiple inventors who share the name “GYTRI LISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US9073100B2Jul 7, 2015

Method and apparatuses for reducing porogen accumulation from a UV-cure chamber

NOVELLUS SYSTEMS INC8 citations82

US10020197B2Jul 10, 2018

Method for reducing porogen accumulation from a UV-cure chamber

NOVELLUS SYSTEMS INC2 citations71

GYTRI LISA

1 patent

US8398816B1Mar 19, 2013

Method and apparatuses for reducing porogen accumulation from a UV-cure chamber

GYTRI LISA25 citations86

LAM RES CORP

1 patent

US8883406B2Nov 11, 2014

Method for using a purge ring with split baffles in photonic thermal processing systems

LAM RES CORP6 citations82

LEE JAMES

1 patent

US8608035B2Dec 17, 2013

Purge ring with split baffles for photonic thermal processing systems

LEE JAMES9 citations82