Inventor
POLYAK ALEXANDER S
US16 patents
⚠️ This page may combine multiple inventors who share the name “POLYAK ALEXANDER S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS7377002B2May 27, 2008
Scrubber box
APPLIED MATERIALS INC20 citations92
US7288165B2Oct 30, 2007
Pad conditioning head for CMP process
APPLIED MATERIALS INC16 citations92
US6939210B2Sep 6, 2005
Slurry delivery arm
APPLIED MATERIALS INC21 citations92
US7774887B2Aug 17, 2010
Scrubber box and methods for using the same
APPLIED MATERIALS INC6 citations73
US10954596B2Mar 23, 2021
Temporal atomic layer deposition process chamber
APPLIED MATERIALS INC4 citations72
US11501957B2Nov 15, 2022
Pedestal support design for precise chamber matching and process control
APPLIED MATERIALS INC4 citations71
US11085129B2Aug 10, 2021
Device to increase deposition uniformity in spatial ALD processing chamber
APPLIED MATERIALS INC0 citations62
US8899408B2Dec 2, 2014
Temperature actuated tensioning mechanism
APPLIED MATERIALS INC3 citations61
US9022715B2May 5, 2015
Load lock chamber designs for high-throughput processing system
APPLIED MATERIALS INC2 citations58
US11798825B2Oct 24, 2023
In-situ wafer rotation for carousel processing chambers
APPLIED MATERIALS INC0 citations51
US10658223B2May 19, 2020
Apparatus for prevention of backside deposition in a spatial ALD process chamber
APPLIED MATERIALS INC0 citations51
US10494736B2Dec 3, 2019
Device to increase deposition uniformity in spatial ALD processing chamber
APPLIED MATERIALS INC0 citations51
US7459056B2Dec 2, 2008
Pad conditioning head for CMP process
APPLIED MATERIALS INC1 citations51
US10959294B2Mar 23, 2021
High temperature heater for processing chamber
APPLIED MATERIALS INC0 citations50
US10415137B2Sep 17, 2019
Non-metallic thermal CVD/ALD Gas Injector and Purge Systems
APPLIED MATERIALS INC0 citations41