Inventor
MURAMOTO RYO
JP22 patents
⚠️ This page may combine multiple inventors who share the name “MURAMOTO RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
13 patentsUS10910240B2Feb 2, 2021
Substrate processing device
SCREEN HOLDINGS CO LTD3 citations72
US10573542B2Feb 25, 2020
Heater cleaning method
SCREEN HOLDINGS CO LTD2 citations72
US10622242B2Apr 14, 2020
Substrate inverting device, substrate processing apparatus, and substrate supporting device, and substrate inverting method, substrate processing method, and substrate supporting method
SCREEN HOLDINGS CO LTD1 citations62
US10249517B2Apr 2, 2019
Substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations61
US10998220B2May 4, 2021
Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method
SCREEN HOLDINGS CO LTD0 citations52
US11961757B2Apr 16, 2024
Substrate holding apparatus and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11443972B2Sep 13, 2022
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10964556B2Mar 30, 2021
Substrate processing apparatus, substrate processing system, and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US12042813B2Jul 23, 2024
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations50
US11211264B2Dec 28, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US11101146B2Aug 24, 2021
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations49
US12538753B2Jan 27, 2026
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations48
US12431369B2Sep 30, 2025
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations46
DAINIPPON SCREEN MFG
7 patentsUS8033288B2Oct 11, 2011
Substrate treatment apparatus
DAINIPPON SCREEN MFG19 citations80
US10032654B2Jul 24, 2018
Substrate treatment apparatus
DAINIPPON SCREEN MFG3 citations72
US9991141B2Jun 5, 2018
Substrate processing apparatus and heater cleaning method
DAINIPPON SCREEN MFG4 citations72
US9624046B2Apr 18, 2017
Substrate processing apparatus and substrate conveying apparatus for use in the same
DAINIPPON SCREEN MFG2 citations72
US8877076B2Nov 4, 2014
Substrate treatment apparatus and substrate treatment method
DAINIPPON SCREEN MFG5 citations72
US9403187B2Aug 2, 2016
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG2 citations60
US9340761B2May 17, 2016
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG1 citations50