Inventor
PONOTH SHOM S
US16 patents
⚠️ This page may combine multiple inventors who share the name “PONOTH SHOM S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
12 patentsUS9064801B1Jun 23, 2015
Bi-layer gate cap for self-aligned contact formation
IBM49 citations94
US9147576B2Sep 29, 2015
Gate contact with vertical isolation from source-drain
IBM12 citations92
US9935168B2Apr 3, 2018
Gate contact with vertical isolation from source-drain
IBM8 citations84
US9349598B2May 24, 2016
Gate contact with vertical isolation from source-drain
IBM5 citations84
US9269792B2Feb 23, 2016
Method and structure for robust finFET replacement metal gate integration
IBM17 citations84
US9171927B2Oct 27, 2015
Spacer replacement for replacement metal gate semiconductor devices
IBM9 citations84
US7709344B2May 4, 2010
Integrated circuit fabrication process using gas cluster ion beam etching
IBM16 citations82
US9614047B2Apr 4, 2017
Gate contact with vertical isolation from source-drain
IBM3 citations73
US9368343B1Jun 14, 2016
Reduced external resistance finFET device
IBM2 citations63
US10121789B2Nov 6, 2018
Self-aligned source/drain contacts
IBM0 citations52
US9576957B2Feb 21, 2017
Self-aligned source/drain contacts
IBM0 citations52
US9224654B2Dec 29, 2015
Fin capacitor employing sidewall image transfer
IBM0 citations52