Inventor
HATADA AKIHIRO
JP4 patents
Patents
4 patentsUS9297745B2Mar 29, 2016
Shape measuring apparatus, and method of manufacturing article
CANON KK0 citations47
US10223575B2Mar 5, 2019
Measurement apparatus for measuring shape of object, system and method for producing article
CANON KK0 citations36
US9372068B2Jun 21, 2016
Measuring apparatus including multi-wavelength interferometer
CANON KK0 citations36
US10060733B2Aug 28, 2018
Measuring apparatus
CANON KK0 citations31