Inventor
KURAMOTO YOSHIYUKI
JP31 patents
⚠️ This page may combine multiple inventors who share the name “KURAMOTO YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
15 patentsUS7608808B2Oct 27, 2009
Injection-locked pulsed laser with high wavelength stability
CANON KK8 citations84
US6937345B2Aug 30, 2005
Measuring system for measuring performance of imaging optical system
CANON KK17 citations84
US7276717B2Oct 2, 2007
Measuring apparatus, exposure apparatus and device manufacturing method
CANON KK9 citations73
US8363226B2Jan 29, 2013
Optical interference measuring apparatus
CANON KK4 citations62
US7773233B2Aug 10, 2010
Method of measuring wavefront retardance aberration based on wavefront and birefringent characteristics
CANON KK2 citations62
US7161681B2Jan 9, 2007
Aberration measuring apparatus comprising wavelength calibration and stabilization
CANON KK2 citations62
US7910871B2Mar 22, 2011
Injection-locked laser, interferometer, exposure apparatus, and device manufacturing method
CANON KK0 citations52
US7548077B2Jun 16, 2009
Measuring apparatus and a measuring method for measuring a polarization characteristic of an optical system
CANON KK0 citations52
US7532019B2May 12, 2009
Measuring apparatus and measuring method
CANON KK1 citations52
US7995213B2Aug 9, 2011
Measurement method, measurement apparatus, exposure apparatus, and device fabrication method
CANON KK0 citations51
US7907263B2Mar 15, 2011
Apparatuses and methods using measurement of a flare generated in an optical system
CANON KK0 citations49
US9297745B2Mar 29, 2016
Shape measuring apparatus, and method of manufacturing article
CANON KK0 citations47
US7787103B2Aug 31, 2010
Projection exposure apparatus, optical member, and device manufacturing method
CANON KK0 citations41
US10018722B2Jul 10, 2018
Measurement apparatus
CANON KK0 citations36
US9372068B2Jun 21, 2016
Measuring apparatus including multi-wavelength interferometer
CANON KK0 citations36
KURAMOTO YOSHIYUKI
7 patentsUS8339611B2Dec 25, 2012
Interferometric distance measurement with harmonic frequency comb generated beams
KURAMOTO YOSHIYUKI7 citations83
US9175953B2Nov 3, 2015
Measurement apparatus to calculate wavefront aberration of optical system using shearing interference fringes, exposure apparatus, and method of manufacturing device
KURAMOTO YOSHIYUKI2 citations61
US9115971B2Aug 25, 2015
Measuring apparatus
KURAMOTO YOSHIYUKI2 citations61
US8559015B2Oct 15, 2013
Measuring apparatus
KURAMOTO YOSHIYUKI3 citations61
US8576404B2Nov 5, 2013
Optical interferometer
KURAMOTO YOSHIYUKI3 citations59
US8724114B2May 13, 2014
Interferometer and distance calculation method therefor
KURAMOTO YOSHIYUKI0 citations40
US8692975B2Apr 8, 2014
Measurement apparatus, exposure apparatus, and device fabrication method
KURAMOTO YOSHIYUKI0 citations40
SUZUKI TAKESHI
3 patentsUS8243256B2Aug 14, 2012
Measurement apparatus for measuring an aberration of an optical system, measurement method, exposure apparatus, and device fabrication method
SUZUKI TAKESHI2 citations63
US8174675B2May 8, 2012
Measuring apparatus, optical system manufacturing method, exposure apparatus, device manufacturing method, and processing apparatus
SUZUKI TAKESHI1 citations52
US8542345B2Sep 24, 2013
Measurement apparatus, exposure apparatus, and device manufacturing method to measure numerical aperture of the optical system using interference fringe
SUZUKI TAKESHI0 citations42