Inventor
BOTOS STEPHEN J
US10 patents
Patents
10 patentsUS7038334B2May 2, 2006
High precision laser machining apparatus
AEROTECH INC45 citations94
US5731641AMar 24, 1998
Linear motor driven vertical lift stage
AEROTECH INC44 citations90
US6442851B1Sep 3, 2002
Direct drive tilt and goniometer stage
AEROTECH INC19 citations88
US6664664B2Dec 16, 2003
Printed circuit linear motor
AEROTECH INC43 citations86
US6700249B1Mar 2, 2004
Direct drive vertical lift and rotation stage
AEROTECH INC13 citations83
US7420298B2Sep 2, 2008
Water cooled high precision z-theta stage
AEROTECH INC11 citations82
US7105956B2Sep 12, 2006
High precision z-theta stage
AEROTECH INC8 citations71
US7084533B2Aug 1, 2006
Dual-function three-axis positioning system
AEROTECH INC8 citations71
US6588081B2Jul 8, 2003
Small footprint direct drive mechanical positioning stage
AEROTECH INC12 citations69
US6486574B2Nov 26, 2002
Small footprint vertical lift and rotation stage
AEROTECH INC8 citations67