Inventor
YAMAGUCHI KUNIAKI
JP37 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI KUNIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
32 patentsUS6609962B1Aug 26, 2003
Dressing apparatus and polishing apparatus
EBARA CORP85 citations98
US6050884AApr 18, 2000
Polishing apparatus
EBARA CORP57 citations96
US6338669B1Jan 15, 2002
Polishing device
EBARA CORP33 citations92
US6042455AMar 28, 2000
Polishing apparatus
EBARA CORP20 citations92
US5893794AApr 13, 1999
Polishing apparatus having robotic transport apparatus
EBARA CORP25 citations92
US9700988B2Jul 11, 2017
Substrate processing apparatus
EBARA CORP8 citations84
US6409582B1Jun 25, 2002
Polishing apparatus
EBARA CORP14 citations84
US9156130B2Oct 13, 2015
Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus
EBARA CORP11 citations83
US9108292B2Aug 18, 2015
Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus
EBARA CORP19 citations83
US6602119B1Aug 5, 2003
Dressing apparatus
EBARA CORP9 citations74
US6379229B1Apr 30, 2002
Polishing apparatus
EBARA CORP7 citations74
US6116986ASep 12, 2000
Drainage structure in polishing plant and method of polishing using structure
EBARA CORP6 citations74
US5961380AOct 5, 1999
Robotic transport apparatus
EBARA CORP7 citations74
US10201888B2Feb 12, 2019
Substrate processing apparatus
EBARA CORP3 citations73
USD795315SAug 22, 2017
Dresser disk
EBARA CORP5 citations73
US7989348B2Aug 2, 2011
Polishing method and polishing apparatus
EBARA CORP6 citations73
US10688622B2Jun 23, 2020
Substrate processing apparatus
EBARA CORP2 citations71
US6428400B1Aug 6, 2002
Drainage structure in polishing plant
EBARA CORP2 citations63
US12350787B2Jul 8, 2025
Substrate processing apparatus
EBARA CORP0 citations62
US11731240B2Aug 22, 2023
Substrate processing apparatus
EBARA CORP0 citations62
US10792782B2Oct 6, 2020
Polishing-amount simulation method for buffing, and buffing apparatus
EBARA CORP1 citations62
US10618140B2Apr 14, 2020
Substrate processing system and substrate processing method
EBARA CORP1 citations62
US10183374B2Jan 22, 2019
Buffing apparatus, and substrate processing apparatus
EBARA CORP1 citations62
US10573509B2Feb 25, 2020
Cleaning apparatus and substrate processing apparatus
EBARA CORP1 citations61
US11192216B2Dec 7, 2021
Polishing method and polishing apparatus
EBARA CORP0 citations52
US10131030B2Nov 20, 2018
Buffing apparatus and substrate processing apparatus
EBARA CORP0 citations52
US6227954B1May 8, 2001
Polishing apparatus
EBARA CORP1 citations52
US5944941AAug 31, 1999
Turning-over machine and polishing apparatus
EBARA CORP0 citations52
US12589464B2Mar 31, 2026
Pusher, transfer device, and substrate processing apparatus
EBARA CORP0 citations51
US10818531B2Oct 27, 2020
Substrate transport system, substrate processing apparatus, hand position adjustment method
EBARA CORP0 citations51
US12358098B2Jul 15, 2025
Liquid feeder and polishing apparatus
EBARA CORP0 citations47
US11541502B2Jan 3, 2023
Substrate processing apparatus
EBARA CORP0 citations46