Inventor
TAKADA NOBUYUKI
JP35 patents
⚠️ This page may combine multiple inventors who share the name “TAKADA NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
30 patentsUS6609962B1Aug 26, 2003
Dressing apparatus and polishing apparatus
EBARA CORP85 citations98
US6878044B2Apr 12, 2005
Polishing apparatus
EBARA CORP47 citations96
US6852019B2Feb 8, 2005
Substrate holding apparatus
EBARA CORP49 citations96
US6358128B1Mar 19, 2002
Polishing apparatus
EBARA CORP61 citations96
US6241578B1Jun 5, 2001
Carrier device in polishing apparatus and method for controlling carrier device
EBARA CORP28 citations93
US7632378B2Dec 15, 2009
Polishing apparatus
EBARA CORP15 citations92
US7083507B2Aug 1, 2006
Substrate holding apparatus
EBARA CORP14 citations92
US6682408B2Jan 27, 2004
Polishing apparatus
EBARA CORP21 citations92
US6413154B1Jul 2, 2002
Polishing apparatus
EBARA CORP25 citations92
US6354922B1Mar 12, 2002
Polishing apparatus
EBARA CORP50 citations92
US6354918B1Mar 12, 2002
Apparatus and method for polishing workpiece
EBARA CORP53 citations92
US6319105B1Nov 20, 2001
Polishing apparatus
EBARA CORP44 citations92
US6312312B1Nov 6, 2001
Polishing apparatus
EBARA CORP27 citations92
US6042455AMar 28, 2000
Polishing apparatus
EBARA CORP20 citations92
US7491117B2Feb 17, 2009
Substrate holding apparatus
EBARA CORP11 citations84
US6899604B2May 31, 2005
Dressing apparatus and polishing apparatus
EBARA CORP17 citations84
US6447385B1Sep 10, 2002
Polishing apparatus
EBARA CORP17 citations84
US6602119B1Aug 5, 2003
Dressing apparatus
EBARA CORP9 citations74
US6379229B1Apr 30, 2002
Polishing apparatus
EBARA CORP7 citations74
US11911872B2Feb 27, 2024
Substrate processing apparatus and substrate processing method
EBARA CORP2 citations73
US11735457B2Aug 22, 2023
Substrate processing apparatus and substrate processing method
EBARA CORP2 citations73
US7850509B2Dec 14, 2010
Substrate holding apparatus
EBARA CORP5 citations73
US7156725B2Jan 2, 2007
Substrate polishing machine
EBARA CORP7 citations73
US12569957B2Mar 10, 2026
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations63
US6558226B1May 6, 2003
Polishing apparatus
EBARA CORP4 citations63
US7638030B2Dec 29, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP3 citations62
US12318881B2Jun 3, 2025
Substrate polishing apparatus and substrate polishing method
EBARA CORP0 citations52
US12211733B2Jan 28, 2025
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations52
US12017323B2Jun 25, 2024
Polishing head system and polishing apparatus
EBARA CORP0 citations51
US11633828B2Apr 25, 2023
Substrate polishing system, substrate polishing method and substrate polishing apparatus
EBARA CORP0 citations49