Inventor

KUENY ANDREW WEEKS

US11 patents

⚠️ This page may combine multiple inventors who share the name “KUENY ANDREW WEEKS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VERITY INSTR INC

4 patents

US7339682B2Mar 4, 2008

Heterodyne reflectometer for film thickness monitoring and method for implementing

VERITY INSTR INC47 citations91

US7049156B2May 23, 2006

System and method for in-situ monitor and control of film thickness and trench depth

VERITY INSTR INC24 citations91

US10365212B2Jul 30, 2019

System and method for calibration of optical signals in semiconductor process systems

VERITY INSTR INC5 citations66

US10861755B2Dec 8, 2020

System and method for measurement of complex structures

VERITY INSTR INC0 citations51

LAM RES CORP

2 patents

US6642063B2Nov 4, 2003

Apparatus for characterization of microelectronic feature quality

LAM RES CORP16 citations91

US6432729B1Aug 13, 2002

Method for characterization of microelectronic feature quality

LAM RES CORP28 citations91

HOSCH JIMMY W

1 patent

US9997325B2Jun 12, 2018

Electron beam exciter for use in chemical analysis in processing systems

HOSCH JIMMY W24 citations87

WHELAN MIKE

1 patent

US8125633B2Feb 28, 2012

Calibration of a radiometric optical monitoring system used for fault detection and process monitoring

WHELAN MIKE38 citations87

KUENY ANDREW WEEKS

1 patent

US9386241B2Jul 5, 2016

Apparatus and method for enhancing dynamic range of charge coupled device-based spectrograph

KUENY ANDREW WEEKS3 citations66

MELONI MARK ANTHONY

1 patent

US9383323B2Jul 5, 2016

Workpiece characterization system

MELONI MARK ANTHONY2 citations53

CORLESS JOHN DOUGLAS

1 patent

US9772226B2Sep 26, 2017

Referenced and stabilized optical measurement system

CORLESS JOHN DOUGLAS0 citations30