Inventor

MIZUTANI TAKEYUKI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “MIZUTANI TAKEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MIZUTANI TAKEYUKI

2 patents

US8089615B2Jan 3, 2012

Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating method

MIZUTANI TAKEYUKI11 citations81

US8675174B2Mar 18, 2014

Exposure apparatus, exposure method, and method for producing device

MIZUTANI TAKEYUKI15 citations78

NIKON CORP

2 patents

US8040489B2Oct 18, 2011

Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid

NIKON CORP3 citations60

US9958785B2May 1, 2018

Exposure apparatus, exposure method, and method for producing device

NIKON CORP0 citations48

NAKANO KATSUSHI

1 patent

US8941808B2Jan 27, 2015

Immersion lithographic apparatus rinsing outer contour of substrate with immersion space

NAKANO KATSUSHI2 citations58

KIUCHI TOHRU

1 patent

US8780326B2Jul 15, 2014

Exposure apparatus, exposure method, and device manufacturing method

KIUCHI TOHRU0 citations40