Inventor
YOSHII YASUHIRO
JP21 patents
⚠️ This page may combine multiple inventors who share the name “YOSHII YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
9 patentsUS7494762B2Feb 24, 2009
Positive resist composition for immersion lithography and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD8 citations83
US8012669B2Sep 6, 2011
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD15 citations80
US11586111B2Feb 21, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations72
US11275306B2Mar 15, 2022
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations72
US7799507B2Sep 21, 2010
Positive resist composition for immersion lithography and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD6 citations63
US11392033B2Jul 19, 2022
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD1 citations62
US11822240B2Nov 21, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations60
US11650497B2May 16, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US11187981B2Nov 30, 2021
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
TAKESHITA MASARU
4 patentsUS8247161B2Aug 21, 2012
Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing resin
TAKESHITA MASARU6 citations83
US8486605B2Jul 16, 2013
Positive resist composition and method of forming resist pattern
TAKESHITA MASARU9 citations81
US8530598B2Sep 10, 2013
Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing resin
TAKESHITA MASARU4 citations61
US8338075B2Dec 25, 2012
Positive resist composition and method of forming resist pattern
TAKESHITA MASARU1 citations50
UTSUMI YOSHIYUKI
2 patentsHADA HIDEO
2 patentsUS9034556B2May 19, 2015
Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern
HADA HIDEO2 citations60
US9040220B2May 26, 2015
Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern
HADA HIDEO0 citations50