Inventor
LU VICTOR Y
US33 patents
⚠️ This page may combine multiple inventors who share the name “LU VICTOR Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
27 patentsUS9472502B1Oct 18, 2016
Cobalt interconnect techniques
TAIWAN SEMICONDUCTOR MFG CO LTD22 citations92
US10510566B2Dec 17, 2019
Cluster tool techniques with improved efficiency
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations82
US10020198B1Jul 10, 2018
Semiconductor structure having low-k spacer and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10269573B2Apr 23, 2019
Device and method for manufacturing a semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10714433B2Jul 14, 2020
Semiconductor structure and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12226807B2Feb 18, 2025
Cleaning device for cleaning electroplating substrate holder
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11433440B2Sep 6, 2022
Cleaning device for cleaning electroplating substrate holder
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11230791B2Jan 25, 2022
Magnetic structure for metal plating control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12387943B2Aug 12, 2025
Structure for embedded gettering in a silicon on insulator wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12040221B2Jul 16, 2024
Fabrication method of metal-free SOI wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11232974B2Jan 25, 2022
Fabrication method of metal-free SOI wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11211259B2Dec 28, 2021
Structure and method for embedded gettering in a silicon on insulator wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11508670B2Nov 22, 2022
Semiconductor structure and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11111910B2Sep 7, 2021
Ultra high vacuum cryogenic pumping apparatus with nanostructure material
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US9951437B2Apr 24, 2018
Insulator plate for metal plating control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10811263B2Oct 20, 2020
Method for forming semiconductor device structure with etch stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10526719B2Jan 7, 2020
Magnetic structure for metal plating control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10522360B2Dec 31, 2019
Method for forming semiconductor device structure with etch stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10307798B2Jun 4, 2019
Cleaning device for cleaning electroplating substrate holder
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10157819B2Dec 18, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US10002780B2Jun 19, 2018
Method of manufacturing a semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9899297B1Feb 20, 2018
Semiconductor device having a through-silicon via and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US10755953B2Aug 25, 2020
Cluster tool techniques with improved efficiency
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10276397B2Apr 30, 2019
CVD metal seed layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10145371B2Dec 4, 2018
Ultra high vacuum cryogenic pumping apparatus with nanostructure material
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US10170312B2Jan 1, 2019
Semiconductor substrate and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45
US9824940B2Nov 21, 2017
Intelligent metrology based on module knowledge
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42