Inventor

CHIN WEI

TW2 patents

Patents

2 patents

US11111910B2Sep 7, 2021

Ultra high vacuum cryogenic pumping apparatus with nanostructure material

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56

US10145371B2Dec 4, 2018

Ultra high vacuum cryogenic pumping apparatus with nanostructure material

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46