Inventor
CHANG JAE-WAN
KR6 patents
Patents
6 patentsUS10636795B2Apr 28, 2020
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD7 citations82
US9978753B2May 22, 2018
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD9 citations82
US10847603B2Nov 24, 2020
Integrated circuit device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD5 citations71
US10297600B2May 21, 2019
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations71
US11177263B2Nov 16, 2021
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations61
US9960032B2May 1, 2018
Methods of forming thin films and methods of fabricating integrated circuit devices using the same
SAMSUNG ELECTRONICS CO LTD0 citations50