Inventor
MOON Sun-min
KR9 patents
Patents
9 patentsUS10636795B2Apr 28, 2020
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD7 citations82
US9978753B2May 22, 2018
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD9 citations82
US10103026B2Oct 16, 2018
Methods of forming material layer
SAMSUNG ELECTRONICS CO LTD3 citations73
US10825893B2Nov 3, 2020
Semiconductor devices
SAMSUNG ELECTRONICS CO LTD5 citations72
US11233118B2Jan 25, 2022
Integrated circuit device having dielectric layer, and method and apparatus for manufacturing the integrated circuit device
SAMSUNG ELECTRONICS CO LTD3 citations71
US10847603B2Nov 24, 2020
Integrated circuit device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD5 citations71
US10297600B2May 21, 2019
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations71
US10468256B2Nov 5, 2019
Methods of forming material layer
SAMSUNG ELECTRONICS CO LTD1 citations62
US11177263B2Nov 16, 2021
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations61