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Inventor
TANG YEMIN
US
2 patents
Patents
2 patents
US10495663B2
Dec 3, 2019
High aspect-ratio low noise multi-axis accelerometers
UNIV MICHIGAN REGENTS
2 citations
66
US10524059B2
Dec 31, 2019
Capacitive-based transducer with high aspect ratio
UNIV MICHIGAN REGENTS
0 citations
34