Inventor
DZIOMKINA NINA VLADIMIROVNA
NL38 patents
⚠️ This page may combine multiple inventors who share the name “DZIOMKINA NINA VLADIMIROVNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
26 patentsUS9442395B2Sep 13, 2016
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV20 citations96
US10898955B2Jan 26, 2021
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV7 citations92
US10245641B2Apr 2, 2019
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV11 citations92
US9737934B2Aug 22, 2017
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV9 citations92
US9507274B2Nov 29, 2016
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV14 citations92
US11960213B2Apr 16, 2024
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV2 citations84
US11628498B2Apr 18, 2023
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV3 citations84
US11376663B2Jul 5, 2022
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV4 citations84
US11235388B2Feb 1, 2022
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV4 citations84
US10875096B2Dec 29, 2020
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV2 citations84
US12366808B2Jul 22, 2025
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV0 citations73
US11754929B2Sep 12, 2023
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV1 citations73
US11003094B2May 11, 2021
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV1 citations73
US11347154B2May 31, 2022
Cleaning a structure surface in an EUV chamber
ASML NETHERLANDS BV3 citations70
US12353139B2Jul 8, 2025
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV0 citations62
US12055862B2Aug 6, 2024
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV0 citations62
US11454895B2Sep 27, 2022
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV0 citations62
US12189313B2Jan 7, 2025
Cleaning a structure surface in an EUV chamber
ASML NETHERLANDS BV0 citations59
US11086238B2Aug 10, 2021
System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support
ASML NETHERLANDS BV0 citations58
US10254660B2Apr 9, 2019
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV0 citations52
US9989867B2Jun 5, 2018
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV0 citations52
US9678445B2Jun 13, 2017
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV0 citations52
US9323164B2Apr 26, 2016
Coatings
ASML NETHERLANDS BV0 citations52
US10126663B2Nov 13, 2018
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV0 citations51
US10018924B2Jul 10, 2018
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV1 citations51
US9829803B2Nov 28, 2017
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV0 citations47
DZIOMKINA NINA VLADIMIROVNA
5 patentsUS8889042B2Nov 18, 2014
Coatings
DZIOMKINA NINA VLADIMIROVNA4 citations72
US8993220B2Mar 31, 2015
Immersion lithographic apparatus and a device manufacturing method
DZIOMKINA NINA VLADIMIROVNA4 citations69
US8823919B2Sep 2, 2014
Lithographic apparatus, removable member and device manufacturing method
DZIOMKINA NINA VLADIMIROVNA5 citations69
US8512817B2Aug 20, 2013
Lithographic apparatus and a method of forming a lyophobic coating on a surface
DZIOMKINA NINA VLADIMIROVNA0 citations51
US8891053B2Nov 18, 2014
Lithographic apparatus, method of manufacturing an article for a lithographic apparatus and device manufacturing method
DZIOMKINA NINA VLADIMIROVNA0 citations49
LAFARRE RAYMOND WILHELMUS LOUIS
3 patentsUS9423699B2Aug 23, 2016
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
LAFARRE RAYMOND WILHELMUS LOUIS7 citations83
US9316927B2Apr 19, 2016
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
LAFARRE RAYMOND WILHELMUS LOUIS3 citations71
US9256139B2Feb 9, 2016
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
LAFARRE RAYMOND WILHELMUS LOUIS3 citations71