Inventor
EYOLFSON MARK
US8 patents
Patents
8 patentsUS6090677AJul 18, 2000
Methods of thermal processing and rapid thermal processing
MICRON TECHNOLOGY INC21 citations92
US6256094B1Jul 3, 2001
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
MICRON TECHNOLOGY INC15 citations90
US6287927B1Sep 11, 2001
Methods of thermal processing and rapid thermal processing
MICRON TECHNOLOGY INC11 citations73
US6369887B2Apr 9, 2002
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
MICRON TECHNOLOGY INC9 citations71
US7319935B2Jan 15, 2008
System and method for analyzing electrical failure data
MICRON TECHNOLOGY INC7 citations66
US7102737B2Sep 5, 2006
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
MICRON TECHNOLOGY INC4 citations60
US6831734B2Dec 14, 2004
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
MICRON TECHNOLOGY INC1 citations60
US6704107B1Mar 9, 2004
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
MICRON TECHNOLOGY INC3 citations60