Inventor
HOCHHALTER ELTON J
US5 patents
Patents
5 patentsUS6256094B1Jul 3, 2001
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
MICRON TECHNOLOGY INC15 citations90
US6369887B2Apr 9, 2002
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
MICRON TECHNOLOGY INC9 citations71
US7102737B2Sep 5, 2006
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
MICRON TECHNOLOGY INC4 citations60
US6831734B2Dec 14, 2004
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
MICRON TECHNOLOGY INC1 citations60
US6704107B1Mar 9, 2004
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
MICRON TECHNOLOGY INC3 citations60