Inventor
BIZEN Kaori
JP6 patents
Patents
6 patentsUS11251018B2Feb 15, 2022
Scanning electron microscope
HITACHI HIGH TECH CORP3 citations71
US11435178B2Sep 6, 2022
Calibration sample, electron beam adjustment method and electron beam apparatus using same
HITACHI HIGH TECH CORP0 citations61
US11276554B2Mar 15, 2022
Scanning electron microscope and method for measuring pattern
HITACHI HIGH TECH CORP1 citations61
US11610756B2Mar 21, 2023
Charged particle beam apparatus and control method
HITACHI HIGH TECH CORP0 citations60
US11456150B2Sep 27, 2022
Charged particle beam device
HITACHI HIGH TECH CORP0 citations50
US10636618B2Apr 28, 2020
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations41