Inventor
MOIZUMI JUN
JP6 patents
Patents
6 patentsUS7619722B2Nov 17, 2009
Lens replacing method and manufacturing method for alternative lens
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US12474641B2Nov 18, 2025
Exposure method, exposure apparatus, and method for manufacturing article
CANON KK0 citations49
US12393128B2Aug 19, 2025
Exposure apparatus, exposure method, and article manufacturing method
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US12468229B2Nov 11, 2025
Exposure method, exposure apparatus, and method for manufacturing article
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US12386272B2Aug 12, 2025
Exposure apparatus, control method of exposure apparatus, information processing apparatus, information processing method, and article manufacturing method
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US11474439B2Oct 18, 2022
Exposure apparatus, exposure method, and method of manufacturing article
CANON KK0 citations45