Inventor
GAUTAM RIBHU
SG11 patents
⚠️ This page may combine multiple inventors who share the name “GAUTAM RIBHU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS11361981B2Jun 14, 2022
Batch substrate support with warped substrate capability
APPLIED MATERIALS INC8 citations81
US11480866B2Oct 25, 2022
Method and apparatus to anneal EUV mask blank
APPLIED MATERIALS INC0 citations60
US10950475B1Mar 16, 2021
Method and apparatus for processing a substrate using non-contact temperature measurement
APPLIED MATERIALS INC0 citations60
US11670525B2Jun 6, 2023
Methods and apparatus for microwave leakage reduction for semiconductor process chambers
APPLIED MATERIALS INC0 citations59
US11629409B2Apr 18, 2023
Inline microwave batch degas chamber
APPLIED MATERIALS INC0 citations59
US11469124B2Oct 11, 2022
Contactless latch and coupling for vacuum wafer transfer cassette
APPLIED MATERIALS INC0 citations59
US11784075B2Oct 10, 2023
Batch substrate support with warped substrate capability
APPLIED MATERIALS INC0 citations58
US12575367B2Mar 10, 2026
Susceptor transfer for process chamber
APPLIED MATERIALS INC0 citations54
US11699634B2Jul 11, 2023
Water cooled plate for heat management in power amplifiers
APPLIED MATERIALS INC0 citations49
US11860528B2Jan 2, 2024
Multi-chamber substrate processing platform
APPLIED MATERIALS INC0 citations45