Inventor
KOH TUCK FOONG
SG14 patents
Patents
14 patentsUS11328929B2May 10, 2022
Methods, apparatuses and systems for substrate processing for lowering contact resistance
APPLIED MATERIALS INC2 citations71
US10991617B2Apr 27, 2021
Methods and apparatus for cleaving of semiconductor substrates
APPLIED MATERIALS INC2 citations69
US10978334B2Apr 13, 2021
Sealing structure for workpiece to substrate bonding in a processing chamber
APPLIED MATERIALS INC0 citations61
US11670513B2Jun 6, 2023
Apparatus and systems for substrate processing for lowering contact resistance
APPLIED MATERIALS INC0 citations60
US11629409B2Apr 18, 2023
Inline microwave batch degas chamber
APPLIED MATERIALS INC0 citations59
US11610807B2Mar 21, 2023
Methods and apparatus for cleaving of semiconductor substrates
APPLIED MATERIALS INC0 citations59
US11569122B2Jan 31, 2023
Methods and apparatus for cleaving of semiconductor substrates
APPLIED MATERIALS INC0 citations59
US12438005B2Oct 7, 2025
Low temperature selective etching of silicon nitride using microwave plasma
APPLIED MATERIALS INC0 citations58
US12518989B2Jan 6, 2026
In-situ calibration/optimization of emissivity settings in vacuum for temperature measurement
APPLIED MATERIALS INC0 citations51
US12476086B2Nov 18, 2025
Spray-coated electrostatic chuck design
APPLIED MATERIALS INC0 citations51
US12057299B2Aug 6, 2024
Methods for selective removal of contact oxides
APPLIED MATERIALS INC0 citations50
US11375584B2Jun 28, 2022
Methods and apparatus for processing a substrate using microwave energy
APPLIED MATERIALS INC0 citations49
US9818624B2Nov 14, 2017
Methods and apparatus for correcting substrate deformity
APPLIED MATERIALS INC1 citations49
US12315739B2May 27, 2025
Isotropic silicon nitride removal
APPLIED MATERIALS INC0 citations46