Inventor
RAO PREETHAM P
SG5 patents
Patents
5 patentsUS10950475B1Mar 16, 2021
Method and apparatus for processing a substrate using non-contact temperature measurement
APPLIED MATERIALS INC0 citations60
US11670525B2Jun 6, 2023
Methods and apparatus for microwave leakage reduction for semiconductor process chambers
APPLIED MATERIALS INC0 citations59
US11629409B2Apr 18, 2023
Inline microwave batch degas chamber
APPLIED MATERIALS INC0 citations59
US10971383B2Apr 6, 2021
Fluorescence based thermometry for packaging applications
APPLIED MATERIALS INC0 citations58
US11375584B2Jun 28, 2022
Methods and apparatus for processing a substrate using microwave energy
APPLIED MATERIALS INC0 citations49