Inventor
LIEW KAI LIANG
SG4 patents
Patents
4 patentsUS9595464B2Mar 14, 2017
Apparatus and method for reducing substrate sliding in process chambers
APPLIED MATERIALS INC2 citations71
US11629409B2Apr 18, 2023
Inline microwave batch degas chamber
APPLIED MATERIALS INC0 citations59
US11289357B2Mar 29, 2022
Methods and apparatus for high voltage electrostatic chuck protection
APPLIED MATERIALS INC0 citations59
US10262877B2Apr 16, 2019
Apparatus and method for reducing substrate sliding in process chambers
APPLIED MATERIALS INC0 citations50