Inventor
KAWAGUCHI MARK NAOSHI
US9 patents
⚠️ This page may combine multiple inventors who share the name “KAWAGUCHI MARK NAOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS11011388B2May 18, 2021
Plasma apparatus for high aspect ratio selective lateral etch using cyclic passivation and etching
LAM RES CORP7 citations82
US11062897B2Jul 13, 2021
Metal doped carbon based hard mask removal in semiconductor fabrication
LAM RES CORP4 citations67
US10276398B2Apr 30, 2019
High aspect ratio selective lateral etch using cyclic passivation and etching
LAM RES CORP1 citations60
US12568781B2Mar 3, 2026
Selective silicon trim by thermal etching
LAM RES CORP0 citations58
US12080592B2Sep 3, 2024
Film stack simplification for high aspect ratio patterning and vertical scaling
LAM RES CORP0 citations46
APPLIED MATERIALS INC
2 patentsUS6680164B2Jan 20, 2004
Solvent free photoresist strip and residue removal processing for post etching of low-k films
APPLIED MATERIALS INC42 citations92
US7655571B2Feb 2, 2010
Integrated method and apparatus for efficient removal of halogen residues from etched substrates
APPLIED MATERIALS INC11 citations80