Inventor
BANERJI ANANDA K
US7 patents
Patents
7 patentsUS9190489B1Nov 17, 2015
Sacrificial pre-metal dielectric for self-aligned contact scheme
LAM RES CORP31 citations93
US10157736B2Dec 18, 2018
Methods of encapsulation
LAM RES CORP13 citations91
US10559468B2Feb 11, 2020
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
LAM RES CORP13 citations86
US9379210B2Jun 28, 2016
Sacrificial pre-metal dielectric for self-aligned contact scheme
LAM RES CORP7 citations83
US11011379B2May 18, 2021
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
LAM RES CORP2 citations73
US10763107B2Sep 1, 2020
Methods of encapsulation
LAM RES CORP3 citations71
US12080592B2Sep 3, 2024
Film stack simplification for high aspect ratio patterning and vertical scaling
LAM RES CORP0 citations46