Inventor

KATO KINYA

JP93 patents

⚠️ This page may combine multiple inventors who share the name “KATO KINYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KATO KINYA

NIKON CORP

Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus

Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus

Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted

Illumination optical apparatus for illuminating a mask, method of manufacturing and using same, and field stop used therein

Interferometer, adjusting method therefor, stage apparatus having the interferometer, and exposure apparatus having the stage apparatus

Apparatus for detecting foreign particles on a surface of a reticle or pellicle

Apparatus with four light detectors for checking surface of mask with pellicle

Exposure apparatus and exposure method for transferring pattern onto a substrate

Charged-particle-beam mapping projection-optical systems and methods for adjusting same

Aperture stop having central aperture region defined by a circular ARC and peripheral region with decreased width, and exposure apparatus and method

Alignment method, projection exposure method, and projection exposure apparatus

Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern

Projection exposure apparatus and method with a plurality of projection optical units

Projection exposure apparatus

Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus

Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus

Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus

Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus

CANON KK

Ion permeable membrane and ion transport method by utilizing said membrane

Method and apparatus for decomposing gaseous aliphatic hydrocarbon halide compound

Method for decomposing halogenated aliphatic hydrocarbon compounds having adsorption process and apparatus for decomposition having adsorption means

Apparatus for treating gas containing substance to be decomposed and method of treating its gas

Method for biodegrading trichloroethylene and method for biodegrading chlorinated organic compound by microorganisms

Method for biodegradation of aromatic and chlorinated compounds using microorganism strain FERM BP-5102

Pseudomonas cepacia strain isolated from termite intestines that degrades trichlorethylene and furan compounds

Partially double-stranded oligonucleotide and method for forming oligonucleotide

Method for biodegradation of polluting substance

Method of forming planar membrane

Method of decomposing halogenated aliphatic hydrocarbon compounds or aromatic compounds and apparatus to be used for the same as well as method of clarifying exhaust gas and apparatus to be used for the same

Method for forming proteoliposome and method for forming giant proteoliposome

Process for preparing trichloracetic acid and apparatus for use in such process

NIPPON TELEGRAPH & TELEPHONE

Optical device and three-dimensional display device

Optical device having reverse mode holographic PDLC and front light guide

Optical devices with high polymer material and method of forming the same

Method for making an optical device using a laser beam interference pattern

Active matrix structure for liquid crystal display elements wherein each of the gate/data lines includes at least a molybdenum-base alloy layer containing 0.5 to 10 wt. % of chromium

Thin film transistor

Optical device and three-dimensional display device

Liquid crystal optical device

Optical device and three-dimensional display device

Optical device and display apparatus having a plate-shaped light guide and an optical control surface thereon

Optical device and display apparatus using light diffraction and light guide

Active matrix cell

NIPPON KOGAKU KK

Pattern position detection apparatus using laser beam

Dual focus optical system

Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication

Variable magnification observation apparatus

Pattern detecting apparatus utilizing energy beam

KATO KINYA

Reference sphere detecting device, reference sphere position detecting device, and three-dimensional-coordinate measuring device

Method of manufacturing an active matrix cell