P

Inventor

HARTSOUGH LARRY D

11 patents
⚠️ This page may combine multiple inventors who share the name “HARTSOUGH LARRY D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

5 patents
US6179973B1Jan 30, 2001

Apparatus and method for controlling plasma uniformity across a substrate

NOVELLUS SYSTEMS INC167 citations98
US6497796B1Dec 24, 2002

Apparatus and method for controlling plasma uniformity across a substrate

NOVELLUS SYSTEMS INC34 citations92
US6444105B1Sep 3, 2002

Physical vapor deposition reactor including magnet to control flow of ions

NOVELLUS SYSTEMS INC22 citations92
US6500321B1Dec 31, 2002

Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target

NOVELLUS SYSTEMS INC47 citations91
US5985115ANov 16, 1999

Internally cooled target assembly for magnetron sputtering

NOVELLUS SYSTEMS INC55 citations90

PERKIN ELMER CORP

2 patents
US4260649AApr 7, 1981

Laser induced dissociative chemical gas phase processing of workpieces

PERKIN ELMER CORP164 citations93
US4204936AMay 27, 1980

Method and apparatus for attaching a target to the cathode of a sputtering system

PERKIN ELMER CORP41 citations92

LAM RES CORP

1 patent
US5503676AApr 2, 1996

Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber

LAM RES CORP81 citations93

GRYPHON PRODUCTS

1 patent
US4420385ADec 13, 1983

Apparatus and process for sputter deposition of reacted thin films

GRYPHON PRODUCTS79 citations93

VARIAN ASSOCIATES

1 patent
US5417833AMay 23, 1995

Sputtering apparatus having a rotating magnet array and fixed electromagnets

VARIAN ASSOCIATES40 citations92

AIRCO INC

1 patent
US4125446ANov 14, 1978

Controlled reflectance of sputtered aluminum layers

AIRCO INC47 citations92