Inventor
FUEKI SHUNSUKE
JP15 patents
⚠️ This page may combine multiple inventors who share the name “FUEKI SHUNSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
14 patentsUS5260579ANov 9, 1993
Charged particle beam exposure system and charged particle beam exposure method
FUJITSU LTD167 citations99
US5262341ANov 16, 1993
Blanking aperture array and charged particle beam exposure method
FUJITSU LTD66 citations96
US5144142ASep 1, 1992
Blanking aperture array, method for producing blanking aperture array, charged particle beam exposure apparatus and charged particle beam exposure method
FUJITSU LTD78 citations96
US6823069B1Nov 23, 2004
Encrypting/decrypting system with programmable logic device/unit and method thereof
FUJITSU LTD44 citations92
US5448075ASep 5, 1995
Electron-beam exposure system having an improved rate of exposure throughput
FUJITSU LTD24 citations92
US5430304AJul 4, 1995
Blanking aperture array type charged particle beam exposure
FUJITSU LTD45 citations92
US6970690B2Nov 29, 2005
Data processing apparatus and card-sized data processing device
FUJITSU LTD22 citations91
US4948983AAug 14, 1990
Alignment of mask and semiconductor wafer using linear fresnel zone plate
FUJITSU LTD19 citations78
US5175435ADec 29, 1992
Electron beam exposure system with increased efficiency of exposure operation
FUJITSU LTD14 citations74
US5130547AJul 14, 1992
Charged-particle beam exposure method and apparatus
FUJITSU LTD8 citations74
US5500930AMar 19, 1996
System to decode instructions indicating the addresses of control codes and providing patterns to direct an electron beam exposure apparatus
FUJITSU LTD7 citations73
US5124560AJun 23, 1992
Electron beam exposure system having an improved data transfer efficiency
FUJITSU LTD8 citations73
US4999487AMar 12, 1991
Alignment of mask and semiconductor wafer using linear Fresnel zone plate
FUJITSU LTD6 citations73
US6009483ADec 28, 1999
System for dynamically setting and modifying internal functions externally of a data processing apparatus by storing and restoring a state in progress of internal functions being executed
FUJITSU LTD6 citations62