Inventor

AOYAMA MASAAKI

JP23 patents

⚠️ This page may combine multiple inventors who share the name “AOYAMA MASAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AOYAMA MASAAKI

NIKON CORP

Holding apparatus for holding an article such as a semiconductor wafer

Device for positioning circular semiconductor wafers

Substrate processing apparatus for coating photoresist on a substrate and forming a predetermined pattern on a substrate by exposure

Exposure apparatus

System for processing and conveying substrate

Exposure apparatus having independent chambers and methods of making the same

ASAHI OPTICAL CO LTD

Comparison type dimension measuring method and apparatus using a laser beam in a microscope system

Automatic focusing device in microscope system

Scanning optical system

Scanning optical system

Scanning optical apparatus

HERAEUS QUARZGLAS

Large sized quartz glass tube, large scale quartz glass preform, process for manufacturing the same and quartz glass optical fiber

Method for manufacturing large-sized quartz glass tube

Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same

FUJITSU LTD

Semiconductor device having a gate insulation film resistant to dielectric breakdown

Dry etching with reduced damage to MOS device

Semiconductor device manufacturing method including ashing process

SHINETSU HANDOTAI KK

Manufacture of a quartz glass vessel for the growth of single crystal semiconductor

Manufacture of a quartz glass vessel for the growth of single crystal semiconductor

YAMAGATA TECHNOPOLIS FOUND

Method and reagent for detecting peroxidase or hydrogen peroxide

FUJITSU VLSI LTD

Dry etching with reduced damage to MOS device

DAIICHI RADIOISOTOPE LAB

N-acyloxylated cycloalkyl compounds, composition containing the same and methods of use therefor

SPECIAL REFERENCE LAB INC

Method for diagnosing cancer using ESR