Inventor
WATSON TOM A
US28 patents
⚠️ This page may combine multiple inventors who share the name “WATSON TOM A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
26 patentsUS6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US5729562AMar 17, 1998
Pulse power generating circuit with energy recovery
CYMER INC241 citations99
US6240117B1May 29, 2001
Fluorine control system with fluorine monitor
CYMER INC205 citations98
US5991324ANov 23, 1999
Reliable. modular, production quality narrow-band KRF excimer laser
CYMER INC196 citations98
US6028880AFeb 22, 2000
Automatic fluorine control system
CYMER INC227 citations96
US6392743B1May 21, 2002
Control technique for microlithography lasers
CYMER INC64 citations95
US6034978AMar 7, 2000
Gas discharge laser with gas temperature control
CYMER INC70 citations95
US5978406ANov 2, 1999
Fluorine control system for excimer lasers
CYMER INC75 citations94
US6408260B1Jun 18, 2002
Laser lithography quality alarm system
CYMER INC17 citations93
US6914919B2Jul 5, 2005
Six to ten KHz, or greater gas discharge laser system
CYMER INC34 citations92
US6320892B1Nov 20, 2001
Energy efficient lithography laser
CYMER INC21 citations92
US6163559ADec 19, 2000
Beam expander for ultraviolet lasers
CYMER INC36 citations92
US6021150AFeb 1, 2000
Laser having baffled enclosure
CYMER INC35 citations92
US5748656AMay 5, 1998
Laser having improved beam quality and reduced operating cost
CYMER INC37 citations92
US5719896AFeb 17, 1998
Low cost corona pre-ionizer for a laser
CYMER INC21 citations92
US6687562B2Feb 3, 2004
Process monitoring system for lithography lasers
CYMER INC48 citations91
US6034984AMar 7, 2000
Tangential fan with cutoff assembly and vibration control for electric discharge laser
CYMER INC17 citations84
US6690706B2Feb 10, 2004
High rep-rate laser with improved electrodes
CYMER INC17 citations83
US7346093B2Mar 18, 2008
DUV light source optical element improvements
CYMER INC8 citations71
US6937635B2Aug 30, 2005
High rep-rate laser with improved electrodes
CYMER INC7 citations71
US6914927B2Jul 5, 2005
Laser discharge chamber passivation by plasma
CYMER INC5 citations71
US6144686ANov 7, 2000
Tangential fan with cutoff assembly and vibration control for electric discharge laser
CYMER INC6 citations63
US7132123B2Nov 7, 2006
High rep-rate laser with improved electrodes
CYMER INC3 citations60
US6644324B1Nov 11, 2003
Laser discharge chamber passivation by plasma
CYMER INC4 citations60
US7277464B2Oct 2, 2007
Method and apparatus for controlling the output of a gas discharge laser system
CYMER INC6 citations57
US7203562B2Apr 10, 2007
Process monitoring system for lithography lasers
CYMER INC4 citations57