Inventor
TAKEMOTO KIKUROU
JP6 patents
Patents
6 patentsUS5843590ADec 1, 1998
Epitaxial wafer and method of preparing the same
SUMITOMO ELECTRIC INDUSTRIES32 citations90
US6270587B1Aug 7, 2001
Epitaxial wafer having a gallium nitride epitaxial layer deposited on semiconductor substrate and method for preparing the same
SUMITOMO ELECTRIC INDUSTRIES12 citations72
US7518216B2Apr 14, 2009
Gallium nitride baseplate, epitaxial substrate, and method of forming gallium nitride
SUMITOMO ELECTRIC INDUSTRIES4 citations62
US6387722B1May 14, 2002
Methods for preparing an epitaxial wafer having a gallium nitride epitaxial layer deposited on a semiconductor substrate
SUMITOMO ELECTRIC INDUSTRIES3 citations61
US7195022B2Mar 27, 2007
Production apparatus for producing gallium nitride semiconductor film and cleaning apparatus for exhaust gas
SUMITOMO ELECTRIC INDUSTRIES2 citations58
US7843040B2Nov 30, 2010
Gallium nitride baseplate and epitaxial substrate
SUMITOMO ELECTRIC INDUSTRIES0 citations51