Inventor

STOELDRAIJER JUDOCUS M D

NL2 patents

Patents

2 patents

US6404499B1Jun 11, 2002

Lithography apparatus with filters for optimizing uniformity of an image

ASML NETHERLANDS BV81 citations89

US6406834B1Jun 18, 2002

Lithographic projection method

ASML NETHERLANDS BV16 citations77