P

Inventor

NOBORI KAZUHIRO

JP62 patents
⚠️ This page may combine multiple inventors who share the name “NOBORI KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NGK INSULATORS LTD

33 patents
US5231690AJul 27, 1993

Wafer heaters for use in semiconductor-producing apparatus and heating units using such wafer heaters

NGK INSULATORS LTD320 citations99
US5306895AApr 26, 1994

Corrosion-resistant member for chemical apparatus using halogen series corrosive gas

NGK INSULATORS LTD157 citations98
US5280156AJan 18, 1994

Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means

NGK INSULATORS LTD406 citations98
US5616024AApr 1, 1997

Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles

NGK INSULATORS LTD99 citations96
US5490228AFeb 6, 1996

Heating units for use in semiconductor-producing apparatuses and production thereof

NGK INSULATORS LTD44 citations96
US7275309B2Oct 2, 2007

Method of manufacturing electrical resistance heating element

NGK INSULATORS LTD34 citations93
US5573690ANov 12, 1996

Ceramic articles

NGK INSULATORS LTD36 citations92
US7848075B2Dec 7, 2010

Electrostatic chuck with heater

NGK INSULATORS LTD10 citations84
US7701693B2Apr 20, 2010

Electrostatic chuck with heater and manufacturing method thereof

NGK INSULATORS LTD11 citations84
US7582367B2Sep 1, 2009

Ceramic member and manufacturing method for the same

NGK INSULATORS LTD15 citations84
US7564008B2Jul 21, 2009

Alumina member and manufacturing method thereof

NGK INSULATORS LTD16 citations84
US7547407B2Jun 16, 2009

Manufacturing method for sintered body with buried metallic member

NGK INSULATORS LTD17 citations84
US7126090B2Oct 24, 2006

Ceramic heaters, a method for producing the same and articles having metal members

NGK INSULATORS LTD19 citations84
US7387977B2Jun 17, 2008

Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method

NGK INSULATORS LTD6 citations74
US10199245B2Feb 5, 2019

Ceramic heater, heater electrode, and method for manufacturing ceramic heater

NGK INSULATORS LTD2 citations71
US7416793B2Aug 26, 2008

Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same

NGK INSULATORS LTD8 citations71
US7948735B2May 24, 2011

Electrostatic chuck and method for manufacturing the same

NGK INSULATORS LTD3 citations63
US6958462B2Oct 25, 2005

Ceramic heaters

NGK INSULATORS LTD3 citations63
US11685077B2Jun 27, 2023

Method of manufacturing wafer mounting table

NGK INSULATORS LTD0 citations62
US12588454B2Mar 24, 2026

AlN ceramic substrate and heater for semiconductor manufacturing apparatus

NGK INSULATORS LTD0 citations61
US12267919B2Apr 1, 2025

Ceramic heater and method of manufacturing the same

NGK INSULATORS LTD0 citations61
US12506028B2Dec 23, 2025

Member for semiconductor manufacturing apparatus

NGK INSULATORS LTD0 citations60
USD1080568SJun 24, 2025

Ceramic heater

NGK INSULATORS LTD0 citations59
USD1080701SJun 24, 2025

Ceramic heater

NGK INSULATORS LTD0 citations59
USD1077876SJun 3, 2025

Ceramic heater

NGK INSULATORS LTD0 citations59
USD1077761SJun 3, 2025

Ceramic heater

NGK INSULATORS LTD0 citations59
USD1077769SJun 3, 2025

Ceramic heater

NGK INSULATORS LTD0 citations59
US12208595B2Jan 28, 2025

AlN joined body

NGK INSULATORS LTD0 citations59
US11437260B2Sep 6, 2022

Heater for semiconductor manufacturing apparatus

NGK INSULATORS LTD0 citations59
US10566228B2Feb 18, 2020

Heater for semiconductor manufacturing apparatus

NGK INSULATORS LTD1 citations59
US12581904B2Mar 17, 2026

Cooling plate and member for semiconductor manufacturing apparatus

NGK INSULATORS LTD0 citations57
US12198965B2Jan 14, 2025

Member for semiconductor manufacturing apparatus, method for manufacturing the same, and mold

NGK INSULATORS LTD0 citations52
US9630380B2Apr 25, 2017

Method for manufacturing alumina sintered body and alumina sintered body

NGK INSULATORS LTD0 citations52

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

8 patents

IWASE TEPPEI

3 patents

PANASONIC CORP

2 patents

MORIOKA IKUHISA

1 patent

NAKAMURA KEIICHI

1 patent

NOBORI KAZUHIRO

1 patent

PANASONIC IP MAN CO LTD

1 patent

Showing the top 50 of 62 patents by PatentIndex Score.