Inventor · disambiguated record
Chiang-Jen Peng
Also filed as: PENG CHIANG-JEN
11 granted patents·1 pending application·92 citations·filing 1996–2003
89Inventor score
Files withTAIWAN SEMICONDUCTOR MFG12
Top patents by PatentIndex Score
12 records- 0169US7018928B2Plasma treatment method to reduce silicon erosion over HDI silicon regionsTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Mar 28, 2006·12 cites·20 claims
- 0261US6103596AProcess for etching a silicon nitride hardmask mask with zero etch biasTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Aug 15, 2000·26 cites·12 claims
- 0358US6500725B1Microelectronic fabrication method providing alignment mark and isolation trench of identical depthTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Dec 31, 2002·8 cites·9 claims
- 0455US6808589B2Wafer transfer robot having wafer blades equipped with sensorsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Oct 26, 2004·5 cites·10 claims
- 0554US6660528B1Method for monitoring contaminating particles in a chamberTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Dec 9, 2003·8 cites·20 claims
- 0646US6429142B1In-situ photoresist removal by an attachable chamber with light sourceTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Aug 6, 2002·11 cites·18 claims
- 0742US6251794B1Method and apparatus with heat treatment for stripping photoresist to eliminate post-strip photoresist extrusion defectsTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jun 26, 2001·8 cites·9 claims
- 0841US6929713B2In-situ photoresist removal by an attachable chamber with light sourceTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 16, 2005·0 cites·7 claims
- 0939US5840203AIn-situ bake step in plasma ash process to prevent corrosionTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Nov 24, 1998·8 cites·19 claims
- 1039US2001019894A1Pre-heat step (or chamber) implemented in pr dry ash machines to effectively eliminate pr extrusion (bubble) after alloyTAIWAN SEMICONDUCTOR MFG·Filed 2001·Application pending·0 cites
- 1135US6642150B1Method for testing for blind hole formed in wafer layerTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Nov 4, 2003·6 cites·1 claims
- 1229US6664194B1Photoexposure method for facilitating photoresist strippingTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Dec 16, 2003·0 cites·34 claims
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