Inventor

BOARDMAN JAMES A

US3 patents

Patents

3 patents

US6596640B1Jul 22, 2003

Method of forming a raised contact for a substrate

INTEL CORP84 citations92

US7105925B2Sep 12, 2006

Differential planarization

INTEL CORP6 citations72

US6914002B2Jul 5, 2005

Differential planarization

INTEL CORP0 citations51