Inventor
BELOUSOV MIKHAIL
US16 patents
⚠️ This page may combine multiple inventors who share the name “BELOUSOV MIKHAIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
9 patentsUS7275861B2Oct 2, 2007
Calibration wafer and method of calibrating in situ temperatures
VEECO INSTR INC21 citations91
US9677944B2Jun 13, 2017
Temperature control for GaN based materials
VEECO INSTR INC6 citations83
US7452125B2Nov 18, 2008
Calibration wafer and method of calibrating in situ temperatures
VEECO INSTR INC15 citations83
US8022372B2Sep 20, 2011
Apparatus and method for batch non-contact material characterization
VEECO INSTR INC8 citations82
US7570368B2Aug 4, 2009
Method and apparatus for measuring the curvature of reflective surfaces
VEECO INSTR INC15 citations82
US10017876B2Jul 10, 2018
Chemical vapor deposition flow inlet elements and methods
VEECO INSTR INC2 citations72
US9200965B2Dec 1, 2015
Temperature control for GaN based materials
VEECO INSTR INC2 citations62
US9053935B2Jun 9, 2015
Chemical vapor deposition with elevated temperature gas injection
VEECO INSTR INC1 citations62
US10002805B2Jun 19, 2018
Processing methods and apparatus with temperature distribution control
VEECO INSTR INC0 citations52
GURARY ALEX
3 patentsUS8895107B2Nov 25, 2014
Chemical vapor deposition with elevated temperature gas injection
GURARY ALEX6 citations82
US8937000B2Jan 20, 2015
Chemical vapor deposition with elevated temperature gas injection
GURARY ALEX4 citations71
US9324590B2Apr 26, 2016
Processing methods and apparatus with temperature distribution control
GURARY ALEX0 citations51