Inventor
HAYASHIDE YOSHIO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHIDE YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
5 patentsUS5500558AMar 19, 1996
Semiconductor device having a planarized surface
MITSUBISHI ELECTRIC CORP78 citations95
US5318920AJun 7, 1994
Method for manufacturing a capacitor having a rough electrode surface
MITSUBISHI ELECTRIC CORP85 citations95
US5290729AMar 1, 1994
Stacked type capacitor having a dielectric film formed on a rough surface of an electrode and method of manufacturing thereof
MITSUBISHI ELECTRIC CORP85 citations95
US5488246AJan 30, 1996
Semiconductor device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP26 citations92
US5840619ANov 24, 1998
Method of making a semiconductor device having a planarized surface
MITSUBISHI ELECTRIC CORP15 citations72
RENESAS TECH CORP
4 patentsUS7258598B2Aug 21, 2007
Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device
RENESAS TECH CORP11 citations83
US7465221B2Dec 16, 2008
Polishing apparatus
RENESAS TECH CORP2 citations62
US7465216B2Dec 16, 2008
Polishing apparatus
RENESAS TECH CORP1 citations62
US6914011B2Jul 5, 2005
Film deposition system and method of fabricating semiconductor device employing the film deposition system
RENESAS TECH CORP6 citations61