Inventor

GHANDEHARI KOUROS

US38 patents

⚠️ This page may combine multiple inventors who share the name “GHANDEHARI KOUROS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GHANDEHARI KOUROS

ADVANCED MICRO DEVICES INC

Semiconductor manufacturing resolution enhancement system and method for simultaneously patterning different feature types

Application of the CVD bilayer ARC as a hard mask for definition of the subresolution trench features between polysilicon wordlines

Method of forming integrated circuit features by oxidation of titanium hard mask

Flash memory with controlled wordline width

Method for using phase-shifting mask

Attenuated phase shift mask for use in EUV lithography and a method of making such a mask

RELACS shrink method applied for single print resist mask for LDD or buried bitline implants using chemically amplified DUV type photoresist

Binary and attenuating phase-shifting masks for multiple wavelengths

Hard mask spacer for sublithographic bitline

Narrow bitline using Safier for mirrorbit

Photon assisted deposition of hard mask formation for use in manufacture of both devices and masks

Organic spin-on anti-reflective coating over inorganic anti-reflective coating

Alignment system for planar charge trapping dielectric memory cell lithography

Optical technique to detect etch process termination

Multilayer low reflectivity hard mask and process therefor

Structure and method for reducing standing waves in a photoresist

Memory with disposable ARC for wordline formation

Thinning of trench and line or contact spacing by use of dual layer photoresist

Memory manufacturing process using disposable ARC for wordline formation

Cross-shaped resist dispensing system and method

Multilayer low reflectivity hard mask and process therefor

System for and method of constructing an alternating phase-shifting mask

SPANSION LLC

Structure and method for preventing UV radiation damage in a memory cell and improving contact CD control

Structure and method for preventing process-induced UV radiation damage in a memory cell

Semiconductor formation method that utilizes multiple etch stop layers

Semiconductor contact and nitride spacer formation system and method

Method of forming narrowly spaced flash memory contact openings and lithography masks

Integrated circuit with contact region and multiple etch stop insulation layer

Triple layer anti-reflective hard mask

VLSI TECHNOLOGY INC

Semiconductor device with anti-reflective structure

Method and apparatus for detecting edges under an opaque layer

Method and apparatus for detecting edges under an opaque layer

KONINKL PHILIPS ELECTRONICS NV

Semiconductor device with anti-reflective structure and methods of manufacture

Method of illumination uniformity in photolithographic systems

VLSI TECHNOLOGY

Method for alignment using multiple wavelengths of light

(unassigned)

Attenuating extreme ultraviolet (EUV) phase-shifting mask fabrication method

PHILIP SEMICONDUCTORS INC

Apparatus and method for the improvement of illumination uniformity in photolithographic systems

GHANDEHARI KOUROS

Multilayer low reflectivity hard mask and process therefor