Inventor
PERSING HAROLD M
US5 patents
Patents
5 patentsUS7397048B2Jul 8, 2008
Technique for boron implantation
VARIAN SEMICONDUCTOR EQUIPMENT23 citations89
US7528389B2May 5, 2009
Profile adjustment in plasma ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT8 citations80
US7687787B2Mar 30, 2010
Profile adjustment in plasma ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT6 citations71
US7615748B2Nov 10, 2009
Outgassing rate detection
VARIAN SEMICONDUCTOR EQUIPMENT2 citations60
US7638781B2Dec 29, 2009
Local pressure sensing in a plasma processing system
VARIAN SEMICONDUCTOR EQUIPMENT0 citations50