Inventor

BORWICK III ROBERT L

US21 patents

⚠️ This page may combine multiple inventors who share the name “BORWICK III ROBERT L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BORWICK III ROBERT L

TELEDYNE LICENSING LLC

Method for fabricating microelectromechanical system (MEMS) devices

High temperature microelectromechanical (MEM) devices and fabrication method

Microelectromechanical (MEM) fluid health sensing device and fabrication method

Microelectromechanical system (MEMS) viscosity sensor for fluid health monitoring

Thermomechanical sensor for fluid diagnostics

Microelectromechanical (MEM) viscosity sensor and method

Thermal and intrinsic stress compensated micromirror apparatus and method

TELEDYNE SCIENT & IMAGING LLC

Integrated field coil for compact atomic devices

Micro-scale system to provide thermal isolation and electrical communication between substrates

Physics package for compact atomic device

Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof

ROCKWELL SCIENT LICENSING LLC

Modules integrating MEMS devices with pre-processed electronic circuitry, and methods for fabricating such modules

High temperature microelectromechanical (MEM) devices

Liquid-medium immersed MEMs devices

DENATALE JEFFREY F

Method of fabricating vertical capacitors in through-substrate vias

Non-planar microcircuit structure and method of fabricating same

STUPAR PHILIP A

Method of fabricating silicon waveguides with embedded active circuitry

Through-substrate vias with polymer fill and method of fabricating same

BORWICK III ROBERT L

System for heating a vapor cell

PAPAVASILIOU ALEXANDROS

Microfabricated inductors with through-wafer vias

HACKER JONATHAN

Ruggedized waveguide encapsulation fixture for receiving a compressed waveguide component