Inventor
PRABHAKAR VINAY
US16 patents
⚠️ This page may combine multiple inventors who share the name “PRABHAKAR VINAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS11670492B2Jun 6, 2023
Chamber configurations and processes for particle control
APPLIED MATERIALS INC5 citations74
US11600470B2Mar 7, 2023
Targeted heat control systems
APPLIED MATERIALS INC2 citations71
US10276364B2Apr 30, 2019
Bevel etch profile control
APPLIED MATERIALS INC3 citations70
US12400843B2Aug 26, 2025
Chamber configurations and processes for particle control
APPLIED MATERIALS INC0 citations62
US12588451B2Mar 24, 2026
Bottom purge for semiconductor processing system
APPLIED MATERIALS INC0 citations61
US11515129B2Nov 29, 2022
Radiation shield modification for improving substrate temperature uniformity
APPLIED MATERIALS INC0 citations61
US10629427B2Apr 21, 2020
Bevel etch profile control
APPLIED MATERIALS INC1 citations60
US11515176B2Nov 29, 2022
Thermally controlled lid stack components
APPLIED MATERIALS INC1 citations56
US10599043B2Mar 24, 2020
Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components
APPLIED MATERIALS INC0 citations50
INTEVAC INC
6 patentsUS9324598B2Apr 26, 2016
Substrate processing system and method
INTEVAC INC7 citations82
US9543114B2Jan 10, 2017
Implant masking and alignment system with rollers
INTEVAC INC4 citations72
US9318332B2Apr 19, 2016
Grid for plasma ion implant
INTEVAC INC4 citations72
US9875922B2Jan 23, 2018
Substrate processing system and method
INTEVAC INC3 citations71
US9583661B2Feb 28, 2017
Grid for plasma ion implant
INTEVAC INC0 citations51
US10446430B2Oct 15, 2019
Patterned chuck for substrate processing
INTEVAC INC0 citations50