Inventor
GANESAN KOUSIK
US14 patents
⚠️ This page may combine multiple inventors who share the name “GANESAN KOUSIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
5 patentsUS8377268B2Feb 19, 2013
Electroplating cup assembly
NOVELLUS SYSTEMS INC19 citations92
US7985325B2Jul 26, 2011
Closed contact electroplating cup assembly
NOVELLUS SYSTEMS INC36 citations92
US7935231B2May 3, 2011
Rapidly cleanable electroplating cup assembly
NOVELLUS SYSTEMS INC36 citations92
US9685353B2Jun 20, 2017
Apparatus and method for edge bevel removal of copper from silicon wafers
NOVELLUS SYSTEMS INC8 citations83
US10745817B2Aug 18, 2020
Configuration and method of operation of an electrodeposition system for improved process stability and performance
NOVELLUS SYSTEMS INC0 citations51