Inventor · disambiguated record
Thanh Nghia Tu
Also filed as: TU THANH · TU THANH N · TU THANH NGHIA
3 granted patents·2 pending applications·7 citations·filing 2007–2013
59Inventor score
Top patents by PatentIndex Score
5 records- 0174US7851239B2Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devicesQUALCOMM MEMS TECHNOLOGIES INC·Filed 2008·Granted Dec 14, 2010·6 cites·36 claims
- 0254US8222066B2Eliminate release etch attack by interface modification in sacrificial layersTU THANH NGHIA·Filed 2008·Granted Jul 17, 2012·1 cites·32 claims
- 0349US8358458B2Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devicesQUALCOMM MEMS TECHNOLOGIES INC·Filed 2010·Granted Jan 22, 2013·0 cites·10 claims
- 0441US2014210836A1Layer for reduced charge migration between mems layersQUALCOMM MEMS TECHNOLOGIES INC·Filed 2013·Application pending·0 cites
- 0540US2012057216A1Multicomponent sacrificial structureFLORES LUCIO·Filed 2007·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →