Inventor

SMITH ADLAI H

US60 patents

⚠️ This page may combine multiple inventors who share the name “SMITH ADLAI H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SMITH ADLAI H

LITEL INSTR INC

Apparatus method of measurement and method of data analysis for correction of optical system

Apparatus, method of measurement, and method of data analysis for correction of optical system

Laser ablation control system and method

Apparatus and process for nozzle production utilizing computer generated holograms

Adaptive optic wafer stepper illumination system

Deformable wafer chuck

In-situ source metrology instrument and method of use

Use of fresnel zone plates for material processing

Dual plate holographic imaging technique and masks

Direct etch processes for the manufacture of high density multichip modules

High power phase masks for imaging systems

Plate correction of imaging systems

Apparatus and process for the production of fine line metal traces

High power phase masks for imaging systems

In situ process control system for steppers

Imaging and illumination system with aspherization and aberration correction by phase steps

Use of Fresnel zone plates for material processing

Reference wafer calibration reticle

In-situ interferometer arrangement

In-situ interferometer arrangement

In-situ source metrology instrument and method of use

Direct etch processes for the manufacture of high density modules

Plate correction technique for imaging systems

Apparatus and process for high speed laminate processing with computer generated holograms

Apparatus and process for optically ablated openings having designed profile

Gray level imaging masks and methods for encoding same

High power masks and methods for manufacturing same

Apparatus and process for using Fresnel zone plate array for processing materials

Process for ablating high density vias in flexible substrate

Precision geographic location system and method utilizing an image product

System and method for advanced navigation

Method and system for high accuracy and reliability registration of multi modal imagery

In-situ interferometer arrangement

Apparatus and process for determination of dynamic scan field curvature

Single plate corrector for stepper lens train

Multilayer e-beam lithography on nonconducting substrates

Method and apparatus for measurement of crossfield chromatic response of projection imaging systems

Apparatus and process for the determination of static lens field curvature

In-situ interferometer arrangement

Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion

Reference wafer and process for manufacturing same

Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion

Process for amelioration of scanning synchronization error

Optimization of overlapping holographic lens array for creating via matrix

Use of fresnel zone plates for material processing

Process for determination of optimized exposure conditions for transverse distortion mapping

Method and apparatus for embedded encoding of overlay data ordering in an in-situ interferometer

Method and apparatus for self-referenced wafer stage positional error mapping

Systems and methods for determination of focus and telecentricity, amelioration of metrology induced effects and application to determination of precision bossung curves

HUNTER ROBERT O JR

Precision geographic location system and method utilizing an image product