P

Inventor

HUNTER JR ROBERT O

US65 patents
⚠️ This page may combine multiple inventors who share the name “HUNTER JR ROBERT O”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LITEL INSTR INC

46 patents
US5978085ANov 2, 1999

Apparatus method of measurement and method of data analysis for correction of optical system

LITEL INSTR INC189 citations99
US5828455AOct 27, 1998

Apparatus, method of measurement, and method of data analysis for correction of optical system

LITEL INSTR INC204 citations99
US5523543AJun 4, 1996

Laser ablation control system and method

LITEL INSTR INC155 citations99
US6130009AOct 10, 2000

Apparatus and process for nozzle production utilizing computer generated holograms

LITEL INSTR INC95 citations98
US5142132AAug 25, 1992

Adaptive optic wafer stepper illumination system

LITEL INSTR INC130 citations97
US5094536AMar 10, 1992

Deformable wafer chuck

LITEL INSTR INC147 citations97
US5633735AMay 27, 1997

Use of fresnel zone plates for material processing

LITEL INSTR INC62 citations96
US5509553AApr 23, 1996

Direct etch processes for the manufacture of high density multichip modules

LITEL INSTR INC85 citations96
US5482801AJan 9, 1996

High power phase masks for imaging systems

LITEL INSTR INC49 citations96
US5392119AFeb 21, 1995

Plate correction of imaging systems

LITEL INSTR INC89 citations96
US5364493ANov 15, 1994

Apparatus and process for the production of fine line metal traces

LITEL INSTR INC67 citations96
US5328785AJul 12, 1994

High power phase masks for imaging systems

LITEL INSTR INC50 citations96
US5202748AApr 13, 1993

In situ process control system for steppers

LITEL INSTR INC88 citations96
US5136413AAug 4, 1992

Imaging and illumination system with aspherization and aberration correction by phase steps

LITEL INSTR INC75 citations96
US5362940ANov 8, 1994

Use of Fresnel zone plates for material processing

LITEL INSTR INC81 citations95
US7381503B2Jun 3, 2008

Reference wafer calibration reticle

LITEL INSTR INC21 citations93
US7286208B2Oct 23, 2007

In-situ interferometer arrangement

LITEL INSTR INC16 citations93
US6963390B1Nov 8, 2005

In-situ interferometer arrangement

LITEL INSTR INC22 citations93
US5660738AAug 26, 1997

Direct etch processes for the manufacture of high density modules

LITEL INSTR INC24 citations92
US5640233AJun 17, 1997

Plate correction technique for imaging systems

LITEL INSTR INC25 citations92
US5571429ANov 5, 1996

Apparatus and process for high speed laminate processing with computer generated holograms

LITEL INSTR INC33 citations92
US5538817AJul 23, 1996

Gray level imaging masks and methods for encoding same

LITEL INSTR INC22 citations92
US5539175AJul 23, 1996

Apparatus and process for optically ablated openings having designed profile

LITEL INSTR INC42 citations92
US5501925AMar 26, 1996

High power masks and methods for manufacturing same

LITEL INSTR INC27 citations92
US5481407AJan 2, 1996

Apparatus and process for using Fresnel zone plate array for processing materials

LITEL INSTR INC44 citations92
US5514618AMay 7, 1996

Process for manufacture of flat panel liquid crystal display using direct laser etch

LITEL INSTR INC55 citations91
US5702662ADec 30, 1997

Process for ablating high density vias in flexible substrate

LITEL INSTR INC26 citations88
US10222178B1Mar 5, 2019

Precision geographic location system and method utilizing an image product

LITEL INSTR INC8 citations84
US9903719B2Feb 27, 2018

System and method for advanced navigation

LITEL INSTR INC14 citations84
US9483816B2Nov 1, 2016

Method and system for high accuracy and reliability registration of multi modal imagery

LITEL INSTR INC10 citations84
US7515250B2Apr 7, 2009

In-situ interferometer arrangement

LITEL INSTR INC8 citations84
US7126668B2Oct 24, 2006

Apparatus and process for determination of dynamic scan field curvature

LITEL INSTR INC17 citations84
US7544449B1Jun 9, 2009

Method and apparatus for measurement of crossfield chromatic response of projection imaging systems

LITEL INSTR INC9 citations82
US7295291B2Nov 13, 2007

Apparatus and process for the determination of static lens field curvature

LITEL INSTR INC7 citations74
US7283202B2Oct 16, 2007

In-situ interferometer arrangement

LITEL INSTR INC4 citations74
US7268360B2Sep 11, 2007

Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion

LITEL INSTR INC9 citations74
US7261983B2Aug 28, 2007

Reference wafer and process for manufacturing same

LITEL INSTR INC5 citations74
US7136144B2Nov 14, 2006

Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion

LITEL INSTR INC9 citations74
US7053979B2May 30, 2006

Process for amelioration of scanning synchronization error

LITEL INSTR INC7 citations74
US5699185ADec 16, 1997

Use of fresnel zone plates for material processing

LITEL INSTR INC14 citations73
US7261985B2Aug 28, 2007

Process for determination of optimized exposure conditions for transverse distortion mapping

LITEL INSTR INC9 citations72
US7598006B1Oct 6, 2009

Method and apparatus for embedded encoding of overlay data ordering in an in-situ interferometer

LITEL INSTR INC7 citations71
US7871002B2Jan 18, 2011

Method and apparatus for self-referenced wafer stage positional error mapping

LITEL INSTR INC5 citations63
US7846624B2Dec 7, 2010

Systems and methods for determination of focus and telecentricity, amelioration of metrology induced effects and application to determination of precision bossung curves

LITEL INSTR INC4 citations63
US7697138B2Apr 13, 2010

Method and apparatus for determination of source polarization matrix

LITEL INSTR INC5 citations63
US7688426B2Mar 30, 2010

Method and apparatus for measurement of exit pupil transmittance

LITEL INSTR INC2 citations63

HUNTER ROBERT O JR

3 patents

INNOVEN ENERGY LLC

1 patent

Showing the top 50 of 65 patents by PatentIndex Score.